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Title: Diagnostic study of capacitively coupled neon rf plasma with traces of O-2/H-2 at intermediate pressure
Authors: Baghel, Shubham Singh
Şahin, Neslihan
Agrawal, Ayushi
Gangwar, R. K.
Tanışlı, Murat
Srivastava, Rajesh
Keywords: capacitively coupled Ne-O-2
H-2 rf discharge
optical emission spectroscopy
plasma diagnostic
collisional radiative model
electron temperature
electron density
metastable populations
Issue Date: 2022
Publisher: Iop Publishing Ltd
Abstract: In this work, we have performed the non-invasive diagnostic study of capacitively coupled Ne-O-2/H-2 mixture plasma through the optical emission spectroscopy (OES) coupled with a suitable collisional radiative (CR) model. Capacitively coupled neon radio-frequency (rf) discharge (flowing downstream) with small admixture of O-2/H-2 have been generated in a vacuum chamber using 13.56 MHz rf signal and 120 W power supply. Keeping O-2 and H-2 flow rates fixed at 0.01 and 0.015 LPM respectively, the neon flow rate has been varied as 0.3, 0.4, 0.5, 0.6, 0.7 and 0.8 LPM to obtain different mixture concentration of Ne-O-2 and Ne-H-2 discharge. The pressure in the chamber has been observed in intermediate range (similar to 500-25 000 Pa) for different mixture concentrations. OES measurements are recorded at various operating conditions in the wavelength range from 200 to 1200 nm. To extract the information of plasma parameters from the OES measurements, a comprehensive fine-structure resolved CR model has been developed. In the diagnostic process, five intense Ne-I emission lines at 594.48, 607.43, 633.44, 638.30, 703.24 nm are used. The CR model considers all the important processes i.e. electron impact excitation, electron impact de-excitation, radiative decay, ionization, two-three body recombination, and diffusion. The quenching process of 1s (1s(5),1s(4),1s(3)) levels of neon by the O-2/H-2 molecule has been included in the model. The radiative transitions from the upper levels to the ground state (S-1(0)) as well as to the 1s levels of neon are corrected for self-absorption. The electron temperature (T (e)) and electron density (n (e)) of the plasma have been extracted for all the mixture concentrations of Ne-O-2 and Ne-H-2. Also, with the different mixture concentrations of O-2/H-2 in neon discharge, the variation of population of metastable levels (1s(5), 1s(3)) of neon as well as intensities of 656.28 nm of hydrogen and 777.4 nm of oxygen lines have been reported and discussed.
ISSN: 0022-3727
Appears in Collections:Scopus İndeksli Yayınlar Koleksiyonu
WoS İndeksli Yayınlar Koleksiyonu

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